Vacuum Sensors - MEMS Pirani Sensors
MEMS Pirani sensors with response from 10 -5 to 10 3 millibar pressure range with two ranges:
- 10-5 to 1 mbar
- 1 to 103 mbar
MEMS Pirani sensors with response from 10 -5 to 10 3 millibar pressure range with two ranges: