The Heimann vacuum sensor (HVS )is a miniature Pirani-type sensor based on a heated resistor structure on a thin micromachined membrane. The sensor comes in a small, robust, TO type metal housing.
MEMS Pirani sensors have response from 10 -5 to 10 3 millibar pressure range with two ranges:
- 10-5 to 1 mbar
- 1 to 103 mbar