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Our store has a featured set of products; not all products are shown. If you need assistance or do not see a product you are looking for contact us at 617-566-3821 or boselec@boselec.com or visit our web site at www.boselec.com.
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Vacuum Sensors - MEMS Pirani Sensors

The Heimann vacuum sensor (HVS )is a miniature Pirani-type sensor based on a heated resistor structure on a thin micromachined membrane. The sensor comes in a small, robust, TO type metal housing.

MEMS Pirani sensors have response from 10 -5 to 10 3 millibar pressure range with two ranges:

  • 10-5 to 1 mbar
  • 1 to 103 mbar