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The Heimann vacuum sensor HVS is a miniature Pirani-type sensor based on a heated resistor structure on a thin micromachined membrane. The sensor comes in a small, robust, TO type metal housing.
The sensor type HVS Vac03k shows a response U(p) typically ranging from 0 – 400 mV in the pressure range 1 mbar - 10-5 mbar. HVS Vac 04 can be used in the 1 - 1000 mbar range.
Two chips, Vac 03k together with Vac04, can be mounted in the same TO8 housing to make the HVS dual chip model - HVS Vac3k+Vav04. This allows for a wider measurement range by switching from Vac03k to Vac04.
Select from the pull down menu above. Please contact our application team for other options or dual sensors.
| HVS Series | Vac03k | Vac04 |
| Housing | TO39 | TO39 |
| Chip size (mm2) | 4.0 x 4.0 | 1.2 x 1.2 |
| Sensor Resistor (kOhms) | 8.5 | 1 |
| On-chip reference resistor (kOhms) | 8.5 | 1 |
| Max. supply voltage (V) | 3.2 | 2 - 4 (see PDF) |
| Operating temperature (C) | -20 to 120 | -20 to 120 |
| Storage temperature (C) | -40 to 120 | -40 to 120 |
