HVS Series Vacuum Sensors - MEMS Pirani Sensors
The Heimann vacuum sensor HVS is a miniature Pirani-type sensor based on a heated resistor structure on a thin micromachined membrane. The sensor comes in a small, robust, TO type metal housing.
The sensor types HVS Vac03g and HVS Vac03k show a response U(p) typically ranging from 0 – 400 mV in the pressure range 1 mbar - 10-5 mbar. HVS Vac 04 can be used in the 1 - 1000 mbar range.
Two chips, Vac 03g together with Vac04, can be mounted in the same TO8 housing to make the HVS dual chip model - HVS Vac3g+Vav04. This allows for a wider measurement range by switching from Vac03g to Vac04.
Select from the pull down menu above. Please contact our application team for other options or dual sensors.
Product Technical Specs
- Summary product specifications are below
- View and download the detailed product sheet at the Download PDF tab
- Please contact us with any questions for or assistance via our contact request page or at 617-566-3821
|Chip size (mm2)||4.0 x 4.0||1.2 x 1.2|
|Sensor Resistor (kOhms)||8.5||1|
|On-chip reference resistor (kOhms)||8.5||1|
|Max. supply voltage (V)||3.2||2 - 4 (see PDF)|
|Operating temperature (C)||-20 to 120||-20 to 120|
|Storage temperature (C)||-40 to 120||-40 to 120|