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Home / Vacuum Sensors - MEMS Pirani Sensors / Page 1 of 1

Vacuum Sensors - MEMS Pirani Sensors

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The Heimann vacuum sensor (HVS )is a miniature Pirani-type sensor based on a heated resistor structure on a thin micromachined membrane. The sensor comes in a small, robust, TO type metal housing.

MEMS Pirani sensors have response from 10 -5 to 10 3 millibar pressure range with two ranges:

  • 10-5 to 1 mbar
  • 1 to 103 mbar
HVS Series Vacuum Sensors - MEMS Pirani Sensors
HVS Series Vacuum Sensors - MEMS Pirani Sensors from $34.95