HVS Series Vacuum Sensors - MEMS Pirani Sensors
The Heimann vacuum sensor HVS is a miniature Pirani-type sensor based on a heated resistor structure on a thin micromachined membrane. The sensor comes in a small, robust, TO type metal housing.
The sensor types HVS Vac03g and HVS Vac03k show a response U(p) typically ranging from 0 – 400 mV in the pressure range 1 mbar - 10-5 mbar. HVS Vac 04 can be used in the 1 - 1000 mbar range.
Two chips, Vac 03g together with Vac04, can be mounted in the same TO8 housing to make the HVS dual chip model. This allows for a wider measurement range by switching from Vac03g to Vac04.
Select Vac03k or Vac04 from pull down menu above. Please contact our application team for other options or dual sensors.
Product Technical Specs
- Summary product specifications are below
- View and download the detailed product sheet at the Download PDF tab
- Please contact us with any questions for or assistance via our contact request page or at 617-566-3821
|Chip size (mm2)||4.0 x 4.0||1.2 x 1.2|
|Sensor Resistor (kOhms)||8.5||1|
|On-chip reference resistor (kOhms)||8.5||1|
|Max. supply voltage (V)||3.2||2 - 4 (see PDF)|
|Operating temperature (C)||-20 to 120||-20 to 120|
|Storage temperature (C)||-40 to 120||-40 to 120|